Device Physics:
`rudimentary' physics for DD (1990) ->
`standard' models for mobility, recombination, impact ionization, band gap narrowing, carrier-carrier scattering, contacts (1991)
-> bulk and contact tunneling models, optical carrier generation
(1992) -> generation by alpha-particles, full-band MC bulk,
FN tunneling & hot-electron injection (1993) -> energy-balance
model, 2D hybrid MC-EB simulator (1994) -> 1D
Schrödinger-Poisson solver (1995) -> gate
tunneling, full-RPA BGN, FEMFETs (1996) -> 3D
hybrid MC-EB (1997) -> high-Temperature models, models for QW
lasers, electrothermal MC (1998) -> prototype SET
simulator SIMNAD, QDD equations in DESSIS, HF and 1/f noise
modeling with direct IFM in DESSIS, 3D QW laser diodes (1999)
Mesh Generation:
automatic refinement 2D (1990) ->
mixed-element 3D meshes (1991) ->
intersection-based approach (1992) -> handling of
complex device layouts, DRAW (1993) -> MESH,
interactive grid generator MDRAW (1994) ->
delaunization module in MESH (1997) -> adaption
criteria for integration of MESH with DIOS (1998) ->
normal off-setting in 2D (1998) and 3D (1999)
Process Simulation:
basic process steps 1D, 2D (1990) -> 2D
analytical doping profiles, 3D solid modeler PROSIT started
(1991) -> TESIM-4 (1D) and DIOS (2D) interfaces,
models for oxidation, non-isotropic deposition & etching (1992)
-> point-defect based models in DIOS,
non-equilibrium dopant transport (1993) -> 3D
device models from 1D, 2D (PROMPT), 1D MC for implantation
Crystal-TRIM (1994) -> arsenic channeling in
crystalline Si (1995) -> stress-dependent oxidation
& silicidation in DIOS (1995) ->
transient-enhanced diffusion modeling in DIOS (1996)
-> Crystal-TRIM implementation in DIOS for
non-planar 2D structures (1996) -> basic algorithms
for full 3D process simulation (1998)
Numerical Algorithms:
iterative solver package PILS (1990) ->
automatic swiching between iterative solvers in PILS (1991)
-> nonlinear elimination in SIMUL (1992)
-> new block-decomposition solver in SIMUL (1993)
-> hybrid solution direct-iterative (1994)
-> parallel multigrid methods for device equations
(1995) -> parallel sparse direct solver SUPER90
(1996) -> nested dissection algorithm, efficient
parallel numerical factorization (1997) -> combined
Newton-Raphson/Broyden nonlinear solver for 3D
Schrödinger-Poisson, PARDISO integration
in device and process simulators (1998)